Problem
A small scale component failure can cause a vacuum leak allowing contaminants to enter the process environment undetected causing a major scrap event.
Solution
Provide a simple and robust hardware kit for an Endura PVD chamber to permit a data monitoring system, such as FabGuard, to monitor the rate of rise in a chamber by running a customized recipe that is added to a normal qual.
Method
The Hardware kit adapts the Endura so that a Leak Detect Recipe can be run at periodic intervals to validate the chamber condition without needing to bring the chamber offline to run a standard rate of rise routine.
Recipe Theory
During the Leak Detect recipe, the gate valve is closed with the ion gauge left on. Fab data systems are able to monitor the ion gauge signal and validate that the signal trend is within established control limits.
About the Hardware
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I.Configurability
Hardware kits can be provided to support 1 thru 6 PVD Chambers per system.
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II.Reliable and Serviceable
Components used are standard commercial items that are readily available and have a long history for reliability and availability.
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III.Installation
Non-Invasive installation does not require splicing or modification of any harnesses already on the tool. Our harnesses connect to the current OEM harness connection points.