Problem
No replacement for the motor and driver (1080-01190 MOTOR SPEED BRUSHLESS 24VDC 4A 1/18.5HP) and gear boxes (1080-01131 GEAR BOX REDUCTION 7.5:1 1/2" DIA. OUTPUT SHAFT or 1080-01132 GEAR BOX REDUCTION 5:1 1/2" DIA. OUTPUT SHAFT) or 0240-83265 for the PVD magnet rotation assembly due to obsolescence.
Solution
One Semiconductor has developed an enhanced drop-in solution for the obsolete rotation motor/driver/gear box assembly.
Method
We have simplified the OEM paradigm by implementing a single integrated solution for either gear box used on PVD chambers. The kit includes: motor, driver, gear box, interface board, harness and mounting hardware.
About the Hardware
All parts come with a 1 year warranty. An optional LED display can be purchased either integrated in the kit or in a maintenance case which displays the rotation for precise rotation measurement, thus allowing another knob for process tuning.
