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One Semiconductor keeps an internal inventory of spare semiconductor equipment parts and spare OEM parts. A global network of partners allows us to ship semiconductor parts quickly and efficiently to nearly any location worldwide!

Our research and collection of alternate spare parts, as well as global access to machine shop suppliers, means that we are able to find custom solutions for you when OEM parts are otherwise unavailable.

Need help finding a part? Contact sales@onesemiconductor.com today!

One Semiconductor also offers the following product enhancements:


  • RTP O2 Analyzer upgrade
  • RF Sputter Endura
  • O-Ring material options
  • Qualified 2nd source parts for cost of ownership reduction
  • RAID Drive upgrade with Rotating Backup
  • Wafer size conversions
  • Ultima 3 piece lid upgrade for Astron Life Performance
  • process conversions
  • Gas panel reconfiguration or customization
  • Heater and ESC Conversions
  • Xe to Xe+ Conversions
  • MxP to MxP+ Conversions
  • SMIF Integration Hardware