Problem
Leaking slit valve preventing proper operation of Applied Materials Centura or Endura platforms.
Solution
One Semiconductor provides a full refurbishment solution to get the slit valve back to new operational condition.
Method
Inspect and validate all parts are in good condition for refurbishment.
Process exposed parts are sent out for cleaning.
Replace all O-rings.
Replace bellows
About the Hardware
All O-rings are replaced with compounds that meet or exceed OEM specifications. The bellows is brand new that meets or exceeds OEM specifications. A helium leak check and cycle test will be conducted on our test fixture to ensure valve performance.
