Problem
Rebuilding a cathode is a complicated and time consuming process which is compounded by the number of parts in the assembly.
Solution
One Semiconductor can rebuild your cathode back to OEM specifications with new hardware, o-rings and electrostatic chuck.
Method
Replace all broken or worn hardware.
Replace all o-rings.
Replace electrostatic chuck.
About the Hardware
All parts meet or exceed OEM specifications. A helium leak check and cycle test will be conducted on our test fixture to ensure cathode performance.
