One Semiconductor rebuilds, tests and warranties DPS Throttle Valve Assemblies.
This critical part requires periodic maintenance to ensure particle performance and chamber reliability.
One Semiconductor uses qualified parts and procedures to fully rebuild and test each unit, including:
- Install New Bellows
- Replace all O-ring seals
- Install New Motor Belts
- Opto Assembly PCB
- Vacuum and Actuation Cycle Testing
- Assemble and Clean Parts
- 6 Month Warranty
Repairs can be made on damaged units, including:
- Bearing assemblies
- Re-anodization of parts
- Replacement of unrepairable parts
